MSA6000 MEMS Accelerometer

  1. Extra Small Size, LCC20 packaging
  2. ±2~±200g Range
  3. Low Noise
  4. Excellent Long-term Stability
  5. Harsh Environment (Shock, Vibration, Temperature)
Category:

Description

MSA6000 MEMS Accelerometers – MEMS Inertial Devices and Systems

Applications

  • IMU/AHRS for Mil-Aerospace
  • Land & Sea Inertial Navigation
  • Directional Drilling
  • Tilt & Inclination

 

Parameter Unit MSA6000-02 -05 -10 -15 -30 -50 -100 -200
Range g ±2 ±5 ±10 ±15 ±30 ±50 ±100 ±200
Bias mg <10 <20 <50 <100 <150 <250 <500 <1000
Bias Stability mg <0.1 <0.3 <0.5 <0.75 <1 <2 <5 <10
Bias Repeatability mg <0.1 <0.3 <0.5 <0.75 <1.5 <2.5 <5.0 <10
Bias Temp. Coefficient mg/°C <0.1 <0.3 <0.5 <0.75 <1.2 <2.5 <5.0 <10
Scale Factor mV/g 1000±8 400±2 200±2 133.3±1 66.6±1 40±1 20±1 10±1
1-year Scale Factor Stability ppm 300 300 300 300 300 300 300 300
Scale Factor Temp. Coefficient ppm /°C 100 100 100 100 100 100 100 100
Sensitive Axis Misalignment mrad (max) <10 <10 <10 <10 <10 <10 <10 <10
% (max) <1 <1 <1 <1 <1 <1 <1 <1
Resolution mg 0.05 0.1 0.3 0.5 1.0 2.5 5.0 10
Non-linearity % of FS <0.2 <0.2 <0.3 <0.3 <0.3 <0.5 <0.5 <0.5
Bandwidth Hz 0-250 0-250 0-500 0-500 0-500 0-500 0-500 0-500
Resonant Frequency kHz 1.3 2.7 2.7 3.8 5.5 5.5 9.8 9.8
Operating Temp. -40°C~+85°C (default);

-55°C~+125°C (as request)

Shock Up to 20,000g (0.15ms half-sine, 3-time shocks in each direction)
Recovery Time <1ms (1000g, 1ms half-sine shock)
Vibration 20g rms, 20~2000Hz (random noise, 30 minutes in each direction)
Packaging Hermetic
ESD Sensitivity Class 2 (requirements MIL-STD-833-G, 1 Method 3015.7) HBM 2kV
Supply Voltage 3.0~7.0Vdc. (Typ. 5.0Vdc)
Output Range 0.5~4.5Vdc@5.0Vdc Supply Voltage (2.5V±10mV@0g)
Supply Current <6mA @5.0Vdc
Output Impedance/Load Drive Max 50pF@Vout (pin 16) and Max. 100pF GND (pin 20)
Weight <1 g
Size Typ. 9.0 x 9.0 x 2.6mm (0.35×0.35×0.101 inch)
All values are typical at +25°C, +5Vdc unless otherwise statement.

 

Structure (unit: mm)

2 VCC +PWR
3 GND Ground
15 SST Self Test
16 Vout Sensor Output
17 ORG-out Filter Output (adjustable bandwidth)
18 ECAP Voltage Reference (1/2 Vcc)
20 GND Ground