MSV1000D Variable Capacitance Accelerometer

  1. Based on MEMS Process
  2. SPI/RS422 Interface
  3. ±2~±200g Range
  4. Low Noise
  5. Excellent Long-term Stability
  6. Harsh Environment
Category:

Description

MSV1000D Variable Capacitance Accelerometers – MEMS Test and Measurement Sensors

Applications

  • Structural Vibration Testing
  • Multi-channel Modal Analysis
  • Product Testing
  • Vibration Control
  • Analytical Model Correlation
  • Design Studies

 

Parameter Unit MSV1000D-02 -10 -15 -30 -50 -100 -150 -200
Range g ±2 ±10 ±15 ±30 ±50 ±100 ±150 ±200
Sensitivity LSB/g 1500,000±30,000 300,000±6000 200,000±4000 100,000±2000 60,000±1200 30,000±600 20,000±400 15,000±300
Frequency Response (@±5%) Hz 0-250 0-1000 0-1000 0-1000 0-1000 0-2000 0-2000 0-2000
Resonant Frequency Hz 1300 1300 3800 3800 4500 5800 8100 101000
Non-linearity %FS Max ≤0.05 ≤0.05 ≤0.05 ≤0.05 ≤0.1 ≤0.3 ≤0.3 ≤0.5
Transverse Sensitivity % Max ≤1 ≤1 ≤1 ≤1 ≤1 ≤1 ≤1 ≤1
Bias mg Max ±50 ±50 ±50 ±100 ±100 ±200 ±300 ±300
Thermal Zero Shift mg/°C ≤0.1 ≤0.1 ≤0.1 ≤0.1 ≤0.1 ≤0.2 ≤0.2 ≤0.2
Thermal Sensitivity Shift ppm/°C ≤10 ≤10 ≤10 ≤10 ≤10 ≤10 ≤10 ≤10
Electrical Clipping Distorition g ±2.5 ±2.5 ±18.75 ±37.5 ±62.5 ±125 ±185 ±250
Mechanical Stop g ±4 ±30 ±30 ±90 ±90 ±150 ±220 ±500
Recovery Time s 1 1 1 1 1 1 1 1
Resolution mg 0.002 0.01 0.015 0.03 0.05 0.1 0.15 0.2
Excitation 4~5.2Vdc
Supply Current 25mA @+5V
Interface SPI/RS422
Housing Material Stainless Steel/Titanium Alloy
Connector Integral Cable, Six Conductor
Identification Manufacturer’s Logo, Model Number and Serial Number
Mounting Thread Holes for Two M2 Mounting Screws/0.68Nm
Acceleration Limit 20,000g
Sinusoidal/Random Vibration 100g pk, 20~2000 Hz/40g rms, 20~2000Hz
Shock (Half-sine) 20,000g pk, 80 μsec
Operating Temp.

-40°C~+85°C(default);

-55°C~+125°C (as request)

Storage Temp. -55°C~125°C
Humidity/Altitude Unaffected (Unit and sensor are hermetically sealed)
ESD Sensitivity Class 2, HBM 2kV
All values are typical at +25°C, 100Hz, +15Vdc unless otherwise statement. Calibration data, traceable to the National Institute of Metrology (NIM) is supplied.

 

Structure (unit: mm)

Top view Side View

 

SPI

Red VCC Power
Black GND GND
Gray SSB Chip Select
Orange SCLK Clock
Green MOSI Master Output/Slave Input
Yellow MISO Master Input/Slave Output

 

RS422

Red VCC Power
Black GND GND
Yellow T+ Slave Output +
Green T- Slave Input-
White R+ Master Input +
Brown R- Master Output –