MSV6000 Variable Capacitance Accelerometer

  1. Extra Small Size, LCC20 Packaging
  2. ±2~±20,000g Range
  3. Low Noise
  4. Large Bandwidth (DC~5000Hz@5%)
  5. Excellent Long-term Stability
  6. Harsh Environment (Shock, Vibration, Temperature)
Category:

Description

MSV6000 Variable Capacitance Accelerometers – MEMS Test and Measurement Sensors

Applications

  • Aviation & Aerospace
  • Helicopter & Aircraft Testing
  • Automotive Testing & Crash Testing
  • Civil Engineering Structures
  • Railway Technology
  • Industrial Testing

 

Parameter Unit MSV6000-02 -10 -30 -50 -100 -200 -500 -1000 -10000 -20000
Range g ±2 ±10 ±30 ±50 ±100 ±200 ±500 ±1000 ±10000 ±20000
Bandwidth (±5%) Hz 0-250 0-1000 0-1000 0-1000 0-1500 0-1500 0-2500 0-2500 0-5000 0-5000
Resonant Frequency kHz 1.3 2.7 5.5 5.5 9.8 9.8 18.0 25.8 50.0 50.0
Noise Density μV/√Hz 10 10 10 10 10 10 10 10 10 10
Bias mg <10 <50 <150 <250 <500 <1000 <2500 <5000 <50000 <100000
Bias Stability mg <0.1 <0.5 <1.5 <2.5 <5.0 <10 <25 <50 <500 <1000
Bias Repeatability mg <0.1 <0.5 <1.5 <2.5 <5.0 <10 <25 <50 <500 <1000
Bias Temp. Coefficient mg/°C <0.2 <0.8 <2.0 <3.0 <5.0 <10 <25 <50 <500 <1000
Sensitivity mV/g 1000±8 200±2 66.6±1 40±1 20±1 10±1 4±0.3 2±0.3 0.2±0.03 0.1±0.01
1-year Sensitivity Stability ppm 300 300 300 300 300 300 1500 3000 5000 5000
Sensitivity Temp. Coefficient ppm/°C 100 100 100 100 100 100 100 100 100 100
Transverse Sensitivity mrad Max <10 <10 <10 <10 <10 <10 <10 <10 <10 <10
% Max <1 <1 <1 <1 <1 <1 <1 <1 <1 <1
Resolution/Threshold (@1 Hz) mg 0.002 0.01 0.05 0.1 5 7.5 15 20 200 400
Non-linearity % of FS <0.5 <0.5 <0.5 <0.5 <0.5 <0.5 <1 <1 <4 <6
Operating Temp.

-40°C~+85°C (default);

-55°C ~+125°C (as request)

Shock Up to 20,000g(0.15ms half-sine, 3 time shocks in each direction)
Recovery Time <1ms (1000g, 1ms half-sine shock)
Vibration 20g rms, 20~2000Hz (random noise, 30 minutes in each direction)
Packaging Hermetic
ESD Sensitivity Class 2(requirements MIL-STD-833-G, 1 Method 3015.7), HBM 2kV
Supply Voltage 3.0-7.0Vdc. (Typ. 5.0Vdc)
Output Range 0.5~4.5Vdc@5.0Vdc Supply Voltage (2.5V±10mV@0g)
Supply Current <6mA @5.0Vdc
Output Impedance/Load Drive Max 50pF, Min 10KΩ
Weight <1 gram
Size Typ. 9.0 x 9.0 x 2.6mm (0.35×0.35×0.101 inch)
All values are typical at +25°C, +5Vdc unless otherwise statement.

 

Structure (unit: mm)